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By Serdar Aksu, Fiona M. Doyle

"CMP will be an essential process in the production of integrated circuits containing copper interconnects. This study aims to improve our mechanistic understanding of the role that organic chelating agents might play in the reactive slurries used in copper CMP. Copper dissolution behavior in EDTA arid glycine was first examined by producing potential-pH diagrams for the copper-water-EDTA and copper-water-glycine 'systems. The results of potentiodynamic polarization experiments were then considered in light of these diagrams. . In-situ polarization experiments were conducted to gain insight into the electrochemistry of copper during dynamic polishing in slurries prepared from EDT A and glycine.IntroductionCopper has recently started to replace aluminum as the interconnect metal in integrated circuits. Copper interconnection offers faster and more reliable integrated circuits due to its higher electrical conductivity and superior electromigration resistance (1). The damascene method is used to form multilevel interconnects in the manufacture of integrated circuit devices with copper metallization (2, 3). Copper is deposited by CVD or electroplating into vias and trenches etched in the interlayer dielectric (IDL), over a diffusion barrier usually made from titanium, tantalum or their nitrides. Chemical mechanical planarization (CMP) then prepares the wafer for the next deposition step, by removing excess copper and planarizing the surface. During CMP, the wafer is rotated and pressed against a rotating platen covered with a polishing pad. Chemically active slurries containing submicron size abrasive particles (Si02, Al20 3, ceria, diamond, etc.) are applied. Both the mechanical action of the abrasive particles and the chemical action of slurry constituents remove material from the wafer surface. Planarization results because material is removed faster from protruding regions on the surface than from recessed regions. Since CMP can globally planarize .the entire wafer, it has become one of the key technologies for producing integrated circuits with copper metallization."

Jan 1, 2000

By William Brinkman, Mark Jolly, Nasim Soleimanian, Karl Dearn, Oliver Brinkman

"Glass manufacturing is a heat intensive process. There is a direct correlation between the batch distribution techniques and the furnace energy consumption, productivity, and quality of the glass manufactured. All four major segments (float, container, fibre, and specialty glasses) would benefit from using an optimised batch distribution technique where possible. Oscillating batch chargers (OBC) have been in use since the early 70s, despite their superior batch shape, coverage, and in turn positive effects on the energy consumption and productivity of the furnace they are almost exclusively used in container glass manufacturing. The OBC’s main difference compared with other charging methods is its ability to directly influence the batch initial velocity. This paper reports on results achieved in CFD models (GFM) used to study effect of the machine on the overall energy consumption in the doghouse and the melt space.IntroductionGlass manufacturing can be divided to four major segments float glass, container glass, fiberglass, and specialty glasses. The financial cost of manufacture, its impact on the environment, lack of standardisation and mounting pressure imposed by the authorities for reduction in emissions means that the industry and its suppliers are utilising CFD modelling in order to tackle these challenges. The need for high temperature to create and maintain the viscous flow, homogenisation of the glass melt, and maintenance of the process to allow continuous output of glass of the right quality are the contributors to the energy intensive activities that are involved in continuous glass manufacturing. This in turn has resulted in design of large container glass furnaces which have high energy consumption, low specific performance, and high CO2 emissions where the most efficient furnaces in the container glass sector have a specific primary energy consumption of 3.8 GJ /tonne of glass at a level of 50% cullet in the batch making even very small improvements in efficiency by operation optimisation a value adding activity [1-14].The theoretical calculated energy required to melt glass is 2 to 3 times less than the energy actually used to melt glass as a result of glass melt passing a zone 5 to 8 times before leaving the tank.[8]. This causes contamination as the result of mixing between the completely molten glass free from bubbles returning to the batch area where there is freshly molten non-homogeneous glass, still containing very large numbers of bubbles and un-molten batch. At high temperature some components are dissolved rather than melted. Given that an un-molten batch is a good thermal insulator, it can be transported a long way into the furnace, increasing the need for homogenization which also increases the glass residence time of glass melt. This is why large unbroken strings of batch should be avoided, as should an overall blanket without gaps."

Jan 1, 2014

By Bingliang Gao, Junli Xu, Michal Korenko, Jinzhao Guan, Liangxing Li, Zhongning Shi, Zhaowen Wang, Aimin Liu

Al-Si alloy, a precursor of solar grade silicon, was prepared by direct electrolysis in cryolite molten salt at 950 oC using high purity silica as material, liquid aluminum as the cathode and high purity graphite as the anode. The electrochemical behavior of Si(IV) ion was investigated using cyclic voltammetry method. The electrolysis products were characterized by XRD, SEM/EDS and ICP. The results indicate that the reduction process of Si(IV) on tungsten electrode is a two-step process and there is about 0.6 V gap between the two steps. The contents of boron and phosphorus in the aluminum-silicon alloy are 3 ppmw and 8 ppmw, which will make the directional solidification purification effectively and reduce the cost of preparation solar grade silicon from metallurgical grade silicon.

Jan 1, 2015

By Peter Brown

The present work involves the study of Chemical Vapor Deposition (CVD) of silicon carbide from the methyltrichlorosilane (MTS) - hydrogen system. A computer program, SOLGASMIX has been employed to calculate the equilibrium compositions of the gaseous and condensed phases in the MTS - H2 system. The results indicate the range of parameters such as temperature, pressure and species concentrations, required to deposit the single phase Sic under thermodynamic equilibrium conditions. A mathematical model for describing the transport phenomena and the rate of deposition of Sic onto a thin rod in a vertically-oriented hot-walled CVD reactor has been developed. Exper iments were conducted using the same operating conditions as those used in the model in order to validate the mathematical predictions. The predicted rates of deposition were found to be in good agreement with those obtained experimentally. The model can be used to study the effects of various operating parameters on the rate of Sic deposition on a fiber.

Jan 1, 1992

By Shenghui Guo, Dongbo Li, Lijun Liu, Chengdong He, Jinhui Peng, Libo Zhang

In present study, partially stabilized zirconia (PSZ) was prepared by CaO doped fused zirconia heated by microwave furnace at the temperature of 1450 oC and holding time of 120 min. The XRD results showed that untreated fused zirconia mainly consists of crystalline compounds of cubic ZrO2 phase; while the roasted one mainly is composed of crystalline compounds of cubic ZrO2 phase and monoclinic ZrO2 phase. It is shown through the optimization of structures of two phases that structure of cubic ZrO2 and monoclinic ZrO2 reject each other, revealing its difficulty in forming coinciding interface and linkage of two phases being of Ca atom. Introduction Due to advantages of zirconia, such as high melting point, chemistry inertia, low heat transmission and so on. Zirconia is always taken as megathermal refractory material[1]. However, in the heating and cooling processes of pure zirconium oxide, martensitic transformation will take place associated with greater shear force and volume change, which severely limits the industrial application of pure zirconia in some areas. Such as: Refractory materials, grinding materials and high temperature insulation materials[2]. Through adding a certain amount of MgO, CaO, or Y2O3 stabilizer, etc.[3,4], the zirconia can change into fully stabilized zirconia, which exists in cubic phase. But this high purity fully stabilized zirconia cracks easily because of thermal stress. Therefore, the thermal shock resistance variation is one of the most important quality indicators of zirconia-based materials. According to the heat treatment, the fully stabilized zirconia can be changed into the partially stabilized zirconia (PSZ)[5], which exists in cubic phase and monoclinic phase and has superior mechanical properties, such as anti-heat, low thermal conductivity, large coefficient of thermal expansion and stability, as well as good wear resistance[6].

Jan 1, 2011

By Michael L. Free

Bacterial oxidation of an arsenopyritic gold-ore .concentrate was carried out with continuous-flow .operation in 14-liter, mechanically agitated reactors. Samples from the slurry reactors were separated into solid and liquid fractions and analyzed separately to determine the electrochemical rates of sulfide conversion by the bacteria and the rates of direct bacterial oxidation of sulfide. The rates of the individual mechanisms are compared to the overall rates of biooxidation in the continuous-flow slurry reactors. The results show that the commonly hypothesize4 direct and indirect mechanisms of biooxidation both play a significant role in the bacterial oxidation of sulfide ores.

Jan 1, 1991

By Patrick R. Taylor

The synthesis of high-purity ultra-fine barium strontium titanate powders (BST: BaO6Sro.4TiO3) has been performed in a non-transferred are D.C. thermal plasma reactor. Slurries of aqueous solutions of dissolved barium and strontium nitrates and solid titanium dioxide powders were used as precursors. Oxygen and argon were used as carrier gases, and pure argon and combinations of argon and nitrogen were used as plasma gases. The plasma torch power was varied, as well as the oxygen flow rate and the total molar concentration of the precursors. A graphite plate was designed to protect the torch electrode and lower the level of impurities in the product. A thermochemical analysis of the Ba(NO3)2-Sr(NO3)2-TiO2-H2O-O2 system was performed to predict the conditions for the formation of BST and the feasibility of the reaction, The powders collected from the different sections of the reactor were characterized using Transmission and Scanning Electron Microscopy, X-Ray Diffraction, and ICP chemical analysis. The powders produced showed high conversion to BST, ultra-fine particle size (< 30 rim) and high purity, which makes this a potential process to produce ceramic materials for electronic devices.

Jan 1, 2003

By Judy Che, Steven Ceccio, Gretar Tryggvason

"A detailed understanding of drop deformation and solidification is essential for quantitative predictions of geometry and properties of parts made by ballistic particle manufacturing processes. Axisymmetric results of towers built by the deposition of multiple drops are presented. In these computations, fluid flow, heat transfer, and phase change are fully coupled throughout the drop deformation and solidification process. The solution method is based on a single set of conservation equations written for all phases simultaneously. The phase boundaries are treated as imbedded interfaces by adding the appropriate source terms to the conservation equations. A parameter study demonstrates the effect of Weber number, Peclet number, and drop deposition frequency on the final shape of the structure. Numerical results show that most successful method of building uniform towers is when two conditions are met. First, each drop solidifies at the same time in the deformation cycle. Second, the cooling rate is slow enough to allow for good adhesion between drops. The ability to predict the final shape of deposited drops will greatly reduce the amount of experimentation necessary to select the desired set parameters for any artifact.IntroductionMaterial deposition techniques based on layering small molten metal drops holds the promise to build small, coherent three-dimensional structures. In this process, numerous 20-100 µm diameter drops are deposited onto a substrate with a low impact velocity (on the order of 5 mis). Both the momentum and trajectory of each drop are controlled precisely to build up complex parts. This material layering technique differs from processes such as spray forming and splat quenching which involve high impact velocities (on the order of 100 mis) and high frequency deposition with little control over individual drop placement. This process of layering small drops can produce parts with near net shape accuracy, while spray forming produces slabs of material which must then be worked to make a usable part. The ability to computationally predict final drop shape and cooling rate has the advantage of allowing the user to select parameters to produce parts with desired shape and mechanical properties. However, the development of such predictive methods requires a thorough understanding of both drop deformation and solidification"

Jan 1, 1999

By M. Zamalloa

Slag foaming is an important phenomenon in many metallurgical processes. It creates large surface areas for multi-phase reactions to take place. In other applications, it protects electrodes and improves the energy efficiency by reducing radiation from hot surfaces. However, it may also be a source of serious disturbances. To control and optimize the use of slag foams, an extensive knowledge of the factors controlling the foam formation and stability is required. Slag foaming experiments were carried out using synthetic FeO-CaO-Si02 slags at temperatures ranging from 1200 to 1350 "C. A data acquisition system was used to continuously measure the foam height, gas flow rate, bubble frequency and temperature. The experimental results show that the gas injection rate has a strong effect on the behaviour of slag foams. At high flow rates and rapid bubbling, unstable foams with short decay times were created. The addition of P20, favours the foam formation and stability by lowering the surface tension of the slag. The average foam life increases with decreasing basicity (CaO/Si02). It is proposed that this is attributed to the increase of the surface viscosity due to surface adsorption of a thin film of silica, retarding the drainage of the liquid films.

Jan 1, 1992

By M. Patel, G. Djambazov, J. Shrimpton

"Removing zinc by distillation can leave the lead bullion virtually free of zinc and also produces pure zinc crystals. Batch distillation is considered in a hemispherical kettle with water-cooled lid, under high vacuum (50 Pa or less). Sufficient zinc concentration at the evaporating surface is achieved by means of a mechanical stirrer.The numerical model is based on the multi-physics simulation package PHYSICA. The fluid flow module of the code is used to simulate the action of the stirring impeller and to determine the temperature and concentration fields throughout the liquid volume including the evaporating surface. The rate of zinc evaporation and condensation is then modelled using Langmuir's equations. Diffusion of the zinc vapour through the residual air in the vacuum gap is also taken into account.Computed results show that the mixing is sufficient and the rate-limiting step of the process is the surface evaporation driven by the difference of the equilibrium vapour pressure and the actual partial pressure of zinc vapour. However, at higher zinc concentrations, the heat transfer through the growing zinc crystal crust towards the cold steel lid may become the limiting factor because the crystallization front may reach the melting point.The computational model can be very useful in optimising the process within its safe limits.IntroductionLead bullion is commonly refined by removing various impurities (e.g. copper, silver, bismuth, antimony, etc) sequentially. This in normally achieved by the addition of reagents which selectively react with the impurities and the resulting compounds removed by various means. To aid efficient mixing (ensure uniform reactions), batch mixing of materials via the aid of impellers is common practice in a number of industrial sectors. Excess zinc, added during the desilvering process can be removed by one of three methods: (1) Vacuum dezincing - During vacuum dezincing, a vacuum is drawn on the agitated molten lead within a hemispherical vessel (Figure 1). Vaporized zinc condenses on the inner top surface of the vessel. The temperature at which zinc commences to vaporize lowers owing to heating under a vacuum. This enables vaporized zinc to be recovered in the form of high purity crystals without oxidation. The zinc crystals are recovered once the vessel lid is removed and the vacuum is broken. (2) Chlorine dezincing - In chlorine dezincing, molten desilvered lead is reacted with chlorine gas, forming a surface layer of zinc chloride contaminated with small amounts of lead chloride."

Jan 1, 2004

By Dan Mancuso

This case study is an example of how Encyle/Texas, Inc. (a subsidiary of ASARCO) responded to various socio-economic forces by converting an idle zinc hydrometallurgical refinery into a metals recycling facility. The facility accepts metal-laden process waste streams and produces various "synthetic ores" which are sold back to industry. Acceptance and reactions by industrial, political, economical and regulatory interests towards the project are also discussed.

Jan 1, 1992

By C. J. Beyke

Slags and/or mattes from three secondary lead producers were studied as part of an effort to develop treatment methods for these lead-bearing residues. Each company used a somewhat different production process. Company A used a reverberatory furnace followed by a blast furnace. Company B used only a blast furnace. Company C used both a reverberatory and a blast furnace, and the scrap material was desulfurized with sodium carbonate prior to smelting. The slag matrix produced from sulfur-bearing scrap consisted mainly of iron-calcium silicates; the slag from desulfurized material was similar, but also contained sodium. In all the slags most lead was present in metallic form, often alloyed with tin, antimony, arsenic, and/or iron. Slag from Company B contained the most alloying elements, often as discrete subparticles within the lead droplets. Mattes were produced at Companies A and B; predominant phases were pyrrhotite and magnetite, while lead was present in metallic form and as galena.

Jan 1, 1995

By Philip Nash, Jie Zhou, Joshua Blackketter

"Large ingots tend to have internal defects such as shrinkage cavities and porosities, which have to be closed during the cogging stage to ensure sound internal quality of forged parts. In this work, finite element methods were used to simulate open die forging passes, with varying parameters that affect the void closure behavior profoundly. Numerical models ware constructed in ABAQUS, DEFORM and FORGE using data taken from footage of the forging process and material mechanical data obtained from the Gleeble compression tests. Forging variables such as pass rotation, reduction per pass, and feed ratio were studied with intense attention paid on the special properties of H13 steel, so that this study can be applied to solve real world problem.IntroductionCenterline defect closure is a frequently studied but still challenging topic in open die forging industry. In practice, open die forging is employed as an effective hot forming process to make desired shape of metal products as well as to ensure center consolidation of internal defects which result from the casting process. Nowadays, remarkable large forgings have been more and more required to meet industries demand. However, the increase in ingot size has tended to result in considerable macrosegregations and shrinkage cavities or voids, which need to be worked thoroughly during the forging process; but the size of the products and limitations of manufacturing capacity, such as the press load, make it difficult to achieve adequate local deformation to close those defects. Therefore, choosing optimal forging parameters under given work condition to ensure good internal quality of forged products is critically important."

Jan 1, 2012

A simulation of a capper concentrate smelter was built with a capacity of 450,000 tons per year. The system&apos;s components to simulate were three : a Reverbetory furnace, a Wiente &apos; s modified converter ( TMC ) and two cranes. The system was classified as dynamic, stochastic and discrete. In the simulation language choice it was concluded that the most advantageous one was GPSS/H. The model verification was done through the interactive Debugger that the language has and the statistical validation was done through the result variables of sane activities, that as a whole characterize the system (charged matte and charged concentrate to the TMC, skimming white metal and skimning slag). The validation was done comparing the simulation results of these variables with the ones obtained for those variables in a specific month in the smelter. The comparison consisted in a difference of means test and in all cases the equality was accepted with a 95% of confidence. The animation tool was PROOF, a general purpose animator, that is used after processing the simulation.

Jan 1, 1994

By A. Siegmund, R. D. Prengaman

Lead anodes used in zinc electrowinning generally contain 0.5 - 1.0 % silver to reduce the rate of corrosion over the service life. For good quality zinc, the cathodes must contain less than 10 ppm lead. In order to reduce the lead contamination of the cathode, the lead anode must become coated with a protective layer of Pb02/Mn02. The formation of this layer may take as long as 30 - 60 days, during which time zinc production is substantially reduced and the cathodes are contaminated with lead. To improve the mechanical properties of Pb-Ag-anodes alloying elements such as calcium, strontium, barium and others are added. The production of cast lead-silver or lead-silver-calcium anodes often results in the formation of numerous holes, voids or laps in the anode surface that can initiate localized internal corrosion. Based on the experience as the major supplier of rolled anodes for copper electrowinning, RSR Technologies has developed an improved anode for zinc electrowinning. The anode consists of a rolled Pb- Ag-Ca-alloy with a controlled surface grain structure. It forms an adherent protective oxide coating within 2 - 3 days when placed in an electrowinning cell. The preferred calcium and silver contents of the alloy are 0.03 - 0.08 % and 0.3 - 0.4%, respectively. Rolling sheets significantly reduces the presence of internal porosity or laps. The lack of defects results in long anode life. The rolling also produces a uniform grain structure to which the corrosion product readily adheres, thus significantly reducing the conditioning period.

Jan 1, 2000

By D. P. Cook, M. I. Bloch, J. A. Dantzig

"In this article, we describe a combined experimental and computational program to study the filling of automotive wheels during low pressure die casting. Experiments are performed by placing thermocouples into the mold walls of a production caster for the Ford F 113 wheel to measure the temperature profiles in the die during processing, and to infer the filling pattern. Computational models are also developed using a 36° section of the wheel pattern, taken directly from CAD data files. We use these models to simulate the filling and heat transfer processes. Comparison between experimental and computational results are presented, demonstrating the viability of this procedure.IntroductionAutomotive companies are using increasing amounts of aluminum in production vehicles: While the main driving force is improved fuel economy through weight reduction, replacing steel wheels by aluminum also offers the potential for improved vehicle performance by reducing unsprung mass. For these reasons, many new vehicles are now supplied with cast aluminum alloy wheels, and the aftermarket for these wheels continues to grow.The most common production process for these wheels is low pressure die casting. The process is subject to numerous defects, including microporosity, cold shuts, cold folds, misruns and inclusions. Scrap rates at the caster of the order of 10% are not uncommon. Many wheels also have large production runs, into the hundreds of thousands of wheels per year. Thus, the cost savings from even small reductions in scrap rate have the potential to be quite significant.Most of the defects are associated with the filling and solidification processes in the mold. The molds are air cooled, and the placement and sizing of cooling passages is currently as much art as science. The ultimate goal of this project is to improve that situation, by implementing simulation procedures that enable engineering design methods to be used in die and process specification."

Jan 1, 2000

By Y. Waseda, S. V. Gnyloskurenko

"Present paper reviews the various processes for making of metallic foams. These methods are classified in accordance with the state of initial metals - liquid, powdered and ionized. Liquid metal can be foamed by direct inputting of gas into melt, using gas releasing foaming agents or producing supersaturated metal-gas solutions. This group also includes methods creating voids in the melt. Powder route is based on using powdered matrix metal with foamable precursor materials. Finally Deposition techniques allows making highly porous metallic structures using ionized metal.Experimental study presented shows importance of wettability in bubble formation at gas blowing into melt simulation liquid (water) through holes. Good wettability of injection holes by water ensures formation of bubbles with smaller sizes that effect to the final foam structure.IntroductionOne of the objectives of future production technology is to make of lightweight constructional materials while achieving improved property and good economy as well.The most perspective lightweight materials are cellular or foamed materials that are Wide8pread. in nature and have a growing interest in industry and everyday life.Even metals and metallic alloys can be produced as cellular solids or metal foams beside of the traditional engineering materials such as polymers, ceramics or glass. Recent developments in metal foams, especially aluminium, have produced a new class of lightweight materials."

Jan 1, 2000

By Dao Su, Kelang Mu, Yufeng Guo, Jinghua Zeng, Tao Jiang

"The influence of high pressure roller grinding (HPRG) on sintering of iron concentrate fines was investigated. Results of mini-sintering tests showed that assimilation temperature of iron concentrate fines decreased from 1230 ? to 1220 ? and assimilation time was shortened from 10 min to 5 min when the iron concentrate fines was pretreated by HPRG. Sinter pot tests showed that the yield of sinter increased from 60.33% to 72.92% , tumble index increased from 44.35% to 46.66%. The investigation indicated that, after being pretreated by HPRG, iron concentrate fines are improved in ballability and the fraction of fine particles increased, resulting in the improvement of granulation property and reactiveness in solid state reaction. As a result, sintering of iron concentrate fines were strengthened.IntroductionWith the rapid development of iron and steel industry and the decrease of high-grade ores, the imports of iron ore are increasing continually. It is of immensely strategic importance for development of iron and steel industry and energy security in our country to make good use of iron concentrate fine which is low price, high grade and has a refractory sintering property. When iron concentrate fine is used in sintering, granulation property of sinter mixture and permeability of sinter bed get poor. As a result, yield and quality of sinter fall down. Many researches show that, when HPRG is used in pelletization, quality of pellets is improved dramatically. Meanwhile, HPRG has a low energy consume, a large handing capacity and it is benefit for environment protect. At this theme, strengthening of sintering of iron concentrate fine pretreated by HPRG was investigated in this paper."

Jan 1, 2012

By B. M. Satish

The aim of the present work is to study the effect of annealing on the vibration damping capacity of high-chromium (16%) ferromagnetic steel. The alloys were prepared from raw materials of 99.9% purity melted in a high frequency induction furnace under high vacuum. The samples were heat-treated in vacuum at various temperatures (800 to 1200°C) for 1 hour followed by slow cooling (120°C/h). The inverted torsional pendulum method was used to evaluate the vibration damping capacity. The results indicated that the vibration damping capacity of the alloys is influenced by annealing and there exists a critical annealing temperature after 1000°C. The damping capacity increases quickly below the critical temperature since the magnetic domains move more easily.

Jan 1, 2009

By Adam Gesing, Paul Marchwica, Jerry Sokolowski, Sharon Lackie

"Often referred to as SEM-EDX, energy-dispersive spectroscopic analysis of characteristic fluorescence x-ray is a standard technique for semi-quantitative elemental composition analysis in scanning electron microscopy. It is quick and extremely useful for identification of phases in the sample microstructure, as long as the constituents are significantly larger than the probe volume from which the fluorescence x-rays originate. The probe volume ranges from a few to several microns, depending on the electron beam spot size and the acceleration voltage. We report on a new variant of an EDX technique developed to overcome this limitation and allow quantitative elemental analysis of smaller phase constituents, down to a size of several nanometers. This variant involves the calculation of compositions of individual phases from multiple analyses of areas containing phases of interest. This significantly increases the usefulness of EDX for quantitative analysis of new nano-structured materials.IntroductionIn any elemental micro-analytical method, the sample material is illuminated by a probe beam that excites an interaction volume of a sample to emit a characteristic signal. This signal in turn interacts with the sample material through absorption and fluorescence mechanisms before a portion of it is collected by a suitable detector and analyzed for elemental composition. The spatial resolution of the method depends on the minimum interaction volume between the probe beam and the sample material.Laser light beams can be tightly focused to a spot size limited by the photon wavelength and can be used to sample the surface of any material. In micro-LIBS (laser-induced plasma spectroscopy) a focused laser beam ablates and vaporizes a small volume of material from the sample surface, creating a plasma spark. Spectral analysis of the light emission from the plasma spark allows the semi-quantitative determination of the elemental composition of the material removed from the sample surface. The smallest reproducible craters achieved are ~ 3mm in diameter and a few nanometers in depth. [l]Particle probe beams of ions or electrons can be focused to a diameter of a few nanometers at the point of impact on the sample. Ions sputter the sample atoms from the point of impact, and the sputtered ionized material is analyzed by mass spectroscopy in a secondary ion mass spectrometer (SIMS). [2] This gives SIMS resolution in a nanometer range. SIMS equipment, however, is expensive and not readily available."

Jan 1, 2013