On FIB Milling Parameters

In recent years, focused ion beam (FIB) has become a powerful microscopy tool. Creating large FIB cross sections are often required to characterize important microstructure features e.g. the depth and morphology of pitting corrosion and stress corrosion cracking in natural gas pipeline steels. Large FIB sectioning often takes long time that not only occupy valuable FIB microscope time, but also consume often expensive consumables that include gallium ion source, aperture and deposition gas etc. The new plasma FIB developed by FEI can speed up milling process by using much larger beam current. However, for most of the laboratories that is limited by conventional Gaion FIB, the milling speed is limited by the relatively small beam current. In this paper, FIB milling rate are studied against milling parameters that include beam dwell time and pixel overlap. By optimizing the milling parameters, milling rate can increase significantly.